@article{ff685c4311cc4953be9273e86e3bfc7d,
title = "Detection and characterization of three-dimensional interconnect bonding voids by infrared microscopy",
keywords = "infrared, microscopy, optical inspection, optical systems",
author = "Jonny H{\"o}glund and Zoltan Kiss and Gyorgy Nadudvari and Zsolt Kovacs and Szabolcs Velkei and Chris Moore and Victor Vartanian and Allen, {Richard A.}",
year = "2014",
month = jan,
doi = "10.1117/1.JMM.13.1.011208",
language = "English",
volume = "13",
journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "1",
}