Atomic visualization of the emergence of orthorhombic phase in Hf0.5Zr0.5O2ferroelectric film with in-situ rapid thermal annealing

Tianjiao Xin, Yonghui Zheng, Yan Cheng, Kai Du, Yiwei Wang, Zhaomeng Gao, Diqing Su, Yunzhe Zheng, Qilan Zhong, Cheng Liu, Rong Huang, Chungang Duan, Sannian Song, Zhitang Song, Hangbing Lyu

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Material Science

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Engineering