In-situ atomic-level observation of reversible first-order transition in Hf0.5Zr0.5O ferroelectric film

Yonghui Zheng; Tianjiao Xin; Jing Yang; Yunzhe Zheng; Zhaomeng Gao; Yiwei Wang; Yilin Xu; Yan Cheng; Kai Du; Diqing Su; Ruiwen Shao; Bingxing Zhou; Zhen Yuan; Qilan Zhong; Cheng Liu; Rong Huang; Xiaodong Tang; Chungang Duan; Sannian Song; Zhitang Song; Hangbing Lyu

doi:10.1109/IEDM45625.2022.10019431

In-situ atomic-level observation of reversible first-order transition in Hf_0.5Zr_0.5O ferroelectric film

Yonghui Zheng, Tianjiao Xin, Jing Yang, Yunzhe Zheng, Zhaomeng Gao, Yiwei Wang, Yilin Xu, Yan Cheng, Kai Du, Diqing Su, Ruiwen Shao, Bingxing Zhou, Zhen Yuan, Qilan Zhong, Cheng Liu, Rong Huang, Xiaodong Tang, Chungang Duan, Sannian Song, Zhitang SongHangbing Lyu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Citations (Scopus)

Original language	English
Title of host publication	2022 International Electron Devices Meeting, IEDM 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	631-634
Number of pages	4
ISBN (Electronic)	9781665489591
DOIs	https://doi.org/10.1109/IEDM45625.2022.10019431
Publication status	Published - 2022
Externally published	Yes
Event	2022 International Electron Devices Meeting, IEDM 2022 - San Francisco, United States Duration: Dec 3 2022 → Dec 7 2022

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
Volume	2022-December
ISSN (Print)	0163-1918

Conference

Conference	2022 International Electron Devices Meeting, IEDM 2022
Country/Territory	United States
City	San Francisco
Period	12/3/22 → 12/7/22

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1109/IEDM45625.2022.10019431

Cite this

Zheng, Y., Xin, T., Yang, J., Zheng, Y., Gao, Z., Wang, Y., Xu, Y., Cheng, Y., Du, K., Su, D., Shao, R., Zhou, B., Yuan, Z., Zhong, Q., Liu, C., Huang, R., Tang, X., Duan, C., Song, S., ... Lyu, H. (2022). In-situ atomic-level observation of reversible first-order transition in Hf_0.5Zr_0.5O ferroelectric film. In 2022 International Electron Devices Meeting, IEDM 2022 (pp. 631-634). (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2022-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM45625.2022.10019431

In-situ atomic-level observation of reversible first-order transition in Hf_0.5Zr_0.5O ferroelectric film. / Zheng, Yonghui; Xin, Tianjiao; Yang, Jing et al.
2022 International Electron Devices Meeting, IEDM 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 631-634 (Technical Digest - International Electron Devices Meeting, IEDM; Vol. 2022-December).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zheng, Y, Xin, T, Yang, J, Zheng, Y, Gao, Z, Wang, Y, Xu, Y, Cheng, Y, Du, K, Su, D, Shao, R, Zhou, B, Yuan, Z, Zhong, Q, Liu, C, Huang, R, Tang, X, Duan, C, Song, S, Song, Z & Lyu, H 2022, In-situ atomic-level observation of reversible first-order transition in Hf_0.5Zr_0.5O ferroelectric film. in 2022 International Electron Devices Meeting, IEDM 2022. Technical Digest - International Electron Devices Meeting, IEDM, vol. 2022-December, Institute of Electrical and Electronics Engineers Inc., pp. 631-634, 2022 International Electron Devices Meeting, IEDM 2022, San Francisco, United States, 12/3/22. https://doi.org/10.1109/IEDM45625.2022.10019431

Zheng Y, Xin T, Yang J, Zheng Y, Gao Z, Wang Y et al. In-situ atomic-level observation of reversible first-order transition in Hf_0.5Zr_0.5O ferroelectric film. In 2022 International Electron Devices Meeting, IEDM 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 631-634. (Technical Digest - International Electron Devices Meeting, IEDM). doi: 10.1109/IEDM45625.2022.10019431

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title = "In-situ atomic-level observation of reversible first-order transition in Hf0.5Zr0.5O ferroelectric film",

author = "Yonghui Zheng and Tianjiao Xin and Jing Yang and Yunzhe Zheng and Zhaomeng Gao and Yiwei Wang and Yilin Xu and Yan Cheng and Kai Du and Diqing Su and Ruiwen Shao and Bingxing Zhou and Zhen Yuan and Qilan Zhong and Cheng Liu and Rong Huang and Xiaodong Tang and Chungang Duan and Sannian Song and Zhitang Song and Hangbing Lyu",

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AU - Zheng, Yonghui

AU - Xin, Tianjiao

AU - Yang, Jing

AU - Zheng, Yunzhe

AU - Gao, Zhaomeng

AU - Wang, Yiwei

AU - Xu, Yilin

AU - Cheng, Yan

AU - Du, Kai

AU - Su, Diqing

AU - Shao, Ruiwen

AU - Zhou, Bingxing

AU - Yuan, Zhen

AU - Zhong, Qilan

AU - Liu, Cheng

AU - Huang, Rong

AU - Tang, Xiaodong

AU - Duan, Chungang

AU - Song, Sannian

AU - Song, Zhitang

AU - Lyu, Hangbing

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